Semiconductor manufacturing technology /
Yoo, Chue San.
Semiconductor manufacturing technology / Chue San Yoo. - Hackensack, N.J. ; London : World Scientific, c2008. - xii, 470 p. : ill. ; 24 cm. - Advanced series in electrical and computer engineering ; v. 13 .
Includes bibliographical references and index.
9789812568236 9812568239
2008299033
GBA864787 bnb
013804591 Uk
Semiconductors--Design and construction.
Semiconductor industry.
TK7871.85 / .Y66 2008
621.38152
Semiconductor manufacturing technology / Chue San Yoo. - Hackensack, N.J. ; London : World Scientific, c2008. - xii, 470 p. : ill. ; 24 cm. - Advanced series in electrical and computer engineering ; v. 13 .
Includes bibliographical references and index.
9789812568236 9812568239
2008299033
GBA864787 bnb
013804591 Uk
Semiconductors--Design and construction.
Semiconductor industry.
TK7871.85 / .Y66 2008
621.38152