TY  - BOOK
AU  - Lee,Hong H.
TI  - Fundamentals of microelectronics processing
SN  - 0070370567 :
AV  - TK7874 .L34 1990
U1  - 621.381 20
PY  - 1990///
CY  - New York
PB  - McGraw-Hill
KW  - Integrated circuits
KW  - Design and construction
KW  - Materials
N1  - Includes bibliographies and index
ER  -