TY  - BOOK
AU  - Yoo,Chue San
TI  - Semiconductor manufacturing technology
SN  - 9789812568236
AV  - TK7871.85 .Y66 2008
U1  - 621.38152 22
PY  - 2008///
CY  - Hackensack, N.J., London
PB  - World Scientific
KW  - Semiconductors
KW  - Design and construction
KW  - Semiconductor industry
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/toc/fy0804/2008299033.html
ER  -