Elliot, David J. <br/><br/>
Integrated circuit fabrication tecgnology / 

 - 2nd  
 - New York:  McGra- Hill,  1989. 
 - xvi, 540 p., 
<br/><br/><label>ISBN: </label>0071007369 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits. 
<br/><br/><label>Dewey Class. No.: </label>621.38173