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| 999 |
_c4337 _d4337 |
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| 001 | 15326454 | ||
| 003 | BD-GzIUT | ||
| 005 | 20220825155128.0 | ||
| 008 | 080612s2008 njua b 001 0 eng | ||
| 010 | _a 2008299033 | ||
| 015 |
_aGBA864787 _2bnb |
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| 016 | 7 |
_a013804591 _2Uk |
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| 020 | _a9789812568236 | ||
| 020 | _a9812568239 | ||
| 035 | _a(OCoLC)ocn150364311 | ||
| 040 |
_aUKM _cUKM _dBTCTA _dBAKER _dYDXCP _dDLC |
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| 042 |
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| 050 | 0 | 0 |
_aTK7871.85 _b.Y66 2008 |
| 082 | 0 | 4 |
_a621.38152 _222 |
| 100 | 1 | _aYoo, Chue San. | |
| 245 | 1 | 0 |
_aSemiconductor manufacturing technology / _cChue San Yoo. |
| 260 |
_aHackensack, N.J. ; _aLondon : _bWorld Scientific, _cc2008. |
||
| 300 |
_axii, 470 p. : _bill. ; _c24 cm. |
||
| 440 | 0 |
_aAdvanced series in electrical and computer engineering ; _vv. 13 |
|
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aSemiconductors _xDesign and construction. |
|
| 650 | 0 | _aSemiconductor industry. | |
| 856 | 4 | 1 |
_3Table of contents _uhttp://www.loc.gov/catdir/toc/fy0804/2008299033.html |
| 906 |
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