000 01211cam a22003497a 4500
999 _c4337
_d4337
001 15326454
003 BD-GzIUT
005 20220825155128.0
008 080612s2008 njua b 001 0 eng
010 _a 2008299033
015 _aGBA864787
_2bnb
016 7 _a013804591
_2Uk
020 _a9789812568236
020 _a9812568239
035 _a(OCoLC)ocn150364311
040 _aUKM
_cUKM
_dBTCTA
_dBAKER
_dYDXCP
_dDLC
042 _aukblsr
_alccopycat
050 0 0 _aTK7871.85
_b.Y66 2008
082 0 4 _a621.38152
_222
100 1 _aYoo, Chue San.
245 1 0 _aSemiconductor manufacturing technology /
_cChue San Yoo.
260 _aHackensack, N.J. ;
_aLondon :
_bWorld Scientific,
_cc2008.
300 _axii, 470 p. :
_bill. ;
_c24 cm.
440 0 _aAdvanced series in electrical and computer engineering ;
_vv. 13
504 _aIncludes bibliographical references and index.
650 0 _aSemiconductors
_xDesign and construction.
650 0 _aSemiconductor industry.
856 4 1 _3Table of contents
_uhttp://www.loc.gov/catdir/toc/fy0804/2008299033.html
906 _a7
_bcbc
_ccopycat
_d2
_encip
_f20
_gy-gencatlg
942 _2ddc
_cBK