000			00461nam a22001817a 4500
999			_c4409 _d4409
003			BD-GzIUT
005			20220825155133.0
008			170724b xxu||||| |||| 00| 0 eng d
020			_a0071007369
082			_a621.38173
100			_aElliot, David J.
245			_aIntegrated circuit fabrication tecgnology /
250			_a2nd
260			_aNew York: _bMcGra- Hill, _c1989.
300			_axvi, 540 p.,
650			_aIntegrated circuits.
942			_2ddc _cBK